Junjie Li

Chinese Academy of Sciences, China

Precisely fabrication and modulation of multiple nanostructures by atomic layer assembly

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Biography

Junjie Li is currently a professor at Institute of Physics, Chinese Academy of Sciences (IOP, CAS). He received the PhD degree in condensed matter physics from Jilin University (2003). Prior to IOP, he worked at Institute of Electronics of Shizuoka University as researcher fellow (2004-2006). He was a senior research scholar in Chemistry department of Stanford University in 2010. His research interest is in the fields of nanofabrication and nanodevices related with metasurface, sensoring and photodetection.   

Abstract

Advanced nanodevices have higher requirements for 3D nanofabrication in tuning the size, shape and spatial arrangement of its nanostructures and their assemblies in nanoscale, however, which are often beyond the reach of conventional lithography or self-assembly techniques. In view of the above, we develop atomic layer assembled 3D nanofabrication based on soft-templates to break through the limitations of traditional rigid-templates, having very well scalability and powerful fabrication capability for multiple solid or hollow nanostructures. Versatile soft-templates can be freely patterned at the nanoscale by mature lithographic processes, along which a precisely controlled atomic layer deposition can assemble high-aspect-ratio nanostructures with a flexible tailoring of the size, shape, and spatial array, and then a dry etching process removes soft scaffolds and leaves freestanding nanostructures over large-area, rigid or soft substrates. To highlight the potentials of this fabrication strategy, the high-performance optical metasurface and ultra-sensitive H2 gas sensor are demonstrated. This approach endows the conventional lithography and assembly techniques with new powerful functionalities and more scalability in 3D nanofabrication, providing a simply promising route to generating complex multiple nanostructures, towards a broad application in modern nanodevices.